It is said that Senryū-ji Temple began when Rōben, the priest who opened Tōdai-ji Temple in Nara, built a temple in this area when he offered prayers for rain in 765 (the first year of Tempyō Jingo). Although the temple deteriorated during the Warring States period, it was reconstructed in the Edo period by Ishigaya Kiyosada who took an office of estate steward in charge of Irima village (Chōfu City) and Izumi village (Komae City) under Tokugawa Ieyasu.